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  • Electronic Materials Case Studies

    Advanced Applications

    Avantor’s performance chemistries support the development of the latest technology nodes through optimized performance and operational conditions, and lower overall cost of ownership. Below are examples of how Avantor’s products are used in advanced high volume manufacturing processes.

    J.T.Baker® Brand Product 

    Device Type

    Tech Node

    Application

    CLk™-228

    Microprocessor

    1x nm

    BEOL CuULK  ~ Residue / Fluorocarbon / Bulk PR Strip

    CLk™-222

    Microprocessor

    22 – 32 nm

    FEOL ~ Thick Resist Strip

    CLk™-168

    Memory

    30 nm

    BEOL ~ Post Cu Etch Residue Clean

    REZI™-38

    Foundry

    20 nm

    FEOL ~ Poly Clean

    CLk™-888

    Foundry

    <20 nm

    FEOL ~ DUO Removal for Gate Last  Patterning

    Microprocessor

    65 nm

    BEOL – CuLowK – Bulk PR / DUO Strip